In the FTIR metrology system Because each molecule absorbs infrared radiation at its unique frequencies, all molecules can be recognized by their distinctive absorption spectra.
Every molecular structure has a different atom arrangement, which results in a different spectrum when it is exposed to infrared light. It is possible to identify between molecules that contain the same number of atoms arranged differently. Diatomic atoms like O2 and noble gasses, which do not absorb in the IR, are the only exceptions.
The IR absorption spectrum can be compared to a molecule’s individual fingerprint.The plot of infrared radiation-related parameters as a function of wavelength or wavenumber is known as the infrared spectrum. Beer’s law states that absorption intensity (peak height) is directly proportional to concentration, which makes it possible to analyze the IR spectrum.
The Global FTIR metrology system market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2023 to 2030.
The QS-1200 desktop system is offered by Nanometrics for use in applications such as measuring epithelial thickness and dopant monitoring.The QS-1200 is made for cutting-edge semiconductor fabs that characterize materials for silicon growth and device production. With the help of tried-and-true optical technology, it offers a new level of FTIR metrology system method integration.
A manual wafer tray is also included to support the 100, 125, 150, 200, and 300 mm SEMI standard wafer sizes. The QS-1200 can also be utilized with wafer parts of unusual shapes and silicon slices that are 2 mm thick.
A single wafer mapping (r, theta) stage for all the aforementioned wafer sizes is a readily available alternative.Common Applications-film thickness epitaxial ,(MEMs, wafers, and dielectric films,Silicon contains substitutional carbon and interstitial oxygen.Phosphorus and boron in BPSG ,Water in SiN .Synopsis of the System
FTIR metrology system approach that is non-destructive and non-contact for a variety of applications employing Nanometrics’ patented FTIR metrology system and algorithmsLarge optical aperture, self-aligning interferometer, and related optics guarantee high sensitivity.
The HSMS/SECS-1 protocols are supported via the SECS interface on the QS-1200 PC system, which is completely GEM compatible.measurements of transmission and reflection 20/30 mapping and unlimited measuring patterns quicker qualification and installationSimple recipe conversion
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