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Since the initial papers on Nano Imprint Lithography (NIL), interest in the technology has risen quickly, first among scientists and subsequently in industries including integrated optics, sensors, and micro fluidics. UV-curable monomer or oligomer is spin coated or dropped onto the UV-NIL substrate.
The imprinted structures are cured by UV-light exposure, which cross-links the resist, and are imprinted using a transparent template (quartz glass or soft working stamps). The template is then separated from the substrate that had been imprinted. Hard UV-NIL is associated with the use of quartz glass stamps, whereas soft UV-NIL is associated with the use of soft working stamps.
Large Field, Complete UV-Nanoim printing, UV transparent stamps imprint a dispensed UV curable material at a pre-programmed contact force. The polymer is cured using UV light. On EVG systems, both soft and firm stamps are acceptable. Quartz glass is typically used to make UV transparent hard stamps (SiO2). Soft stamps resemble those.
UV transparent stamps imprint dispensed UV curable material at a pre-programmed contact force. The polymer is cured using UV light. On EVG systems, both soft and firm stamps are acceptable.
Quartz glass is typically used to make UV transparent hard stamps (SiO2). Soft stamps resemble those employed in micro contact printing (PDMS, for instance), where the stamp is mounted on either a thick, rigid backplane or a thin, conformal backplane.
For applications requiring large-area imprinting, soft stamps are frequently employed. Both a non-parallel release mechanism and an anti-sticking layer help the release process after curing.
Global UV Nanoimprint lithography market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2024 to 2030.
EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS. SMS-NIL offers customers a consistent, economical approach for achieving ultra-high-resolution patterning on large-area surfaces based on EVG’s tried-and-true UV-NIL equipment.
Customers can produce full-area nanoimprints and optically aligned UV-NIL on existing EVG equipment using the new technology’s soft working stamp nanoimprint technique. Customers can save a lot of processing time and money by processing the stamp and imprinting on the same instrument without adding any additional processing stages.
