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Bow is the separation between a wafer’s surface and its best fit plane in the middle. The highest positive and negative deviations from the best-fit plane are added to create warp (wafer unclamped). Several factors are used to represent the wafer’s shape.
Bow and Warp is a parameter reflecting the shape when the wafer is kept in its natural state without any vacuum suctioning. The difference between the wafer thickness’s maximum and minimum values is the total thickness value (wafer clamped).
It is also possible to measure the front and back surfaces of the wafer in its natural state and then calculate the GBIR (TTV) based on the data. The site flatness index of the reference surface is called SFQR, and it serves as an evaluation.
Wafer diameter, thickness, gravity, and how the wafer is held are among the elements that affect warp wafer readings.Confocal sensors are used by wafer producers in their specialised inspection systems to precisely measure each wafer’s 2D flatness profile.
They then compute the bow and warp parameters using this information. On smooth, mirror-like surfaces with little noise, acuity confocal sensors perform well.
The Global Wafer bow and warp measurement system Market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2023 to 2030.
The foundational components for integrated circuits, the microelectronic building blocks found in many computers, cell phones, and other devices, are silicon wafers. The production and measurement of silicon wafers is a difficult and rigorous procedure, despite the fact that they are used for many ordinary goods.
Manufacturers pay close attention to the bow, warp, and general flatness of the substrates when making silicon wafers. The bow measurement is the deviation from the median surface’s median point.
In order to take measurements that are incredibly precise, the median surface’s location must be understood. Depending on whether the centre point is above or below the reference plane, bow can either be a positive or negative quantity.
In contrast to bow measurements, which only use the centre point, warp measurements use the full median surface to determine the difference between the median surface’s maximum and lowest distances.
