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In the production of semiconductors, wafers are transported and stored using wafer cassettes. They are also known as wafer carriers and come in a variety of materials to enable various applications, including thermal processing.
They are made to hold or transport many wafers of the same size. Typically, cassettes are used to transfer wafers between processing chambers and other storage containers after being picked up and placed in cassettes using a vacuum wand.
Wafer cassette design has kept up as semiconductor fabrication technology has developed to create more complex devices.
Higher degrees of automation, increased tool uptime and throughput,Wafer Carrier via Entegris Inc. higher process temperatures, more mask layers, and compound semiconductor materials are now required for semiconductor production.
Wafer cassettes, made of either solid polymers or stainless steel, offer a secure location for carrying wafers. These cassettes can tolerate a wide range of temperatures, are non-deforming, and non-contaminating, making them suitable for a number of settings.
Certain cassettes are made to be handled both manually and robotically, making them easier to use with any lab setup. Fully conductive stainless steel models make them just as useful in the production of semiconductors as plastic.
The Global Wafer Cassette Market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2023 to 2030.
For certain semiconductor applications, wafer cassettes are made from a variety of materials. High semiconductor baking temperatures can be tolerated by stainless steel wafer cassettes.
They enable for consistent heat distribution, are totally conductive, non-deforming, non-contaminating, and have a Rockwell hardness value that is far lower than silicon.
In order to improve static dissipation and prevent wafer damage brought on by a buildup and discharge of static electricity, plastics are frequently combined with other materials like carbon.
Polyetheretherketone (PEEK) and carbon fibre or carbon nanotubes, as well as polypropylene with carbon powder, are examples of plastic materials. Materials that are resistant to degradation by harsh chemicals, such as perfluoroalkoxy alkane (PFA), may be used in cassettes built for wet chemical processing applications.
