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A vacuum chamber, customised gas delivery system, radio frequency (RF) waveform generator to power the plasma, heated chuck to seat the wafer and exhaust system comprise the dry etching hardware design.
Chemical etching wafers is a technique that removes material from the surface of a wafer in layers during the fabrication of Silicon Wafers (Si), Gallium Arsenide (GaAs), and Gallium Nitride wafers.
Wet chemical etching methods use dissolving processes to remove components from the top layer of an integrated device structure.Dry etching is often an anisotropic method in which the momentum of accelerating ion species combined with a masking process is employed to physically remove and etch the target materials.
Applications for UV curing and charge erase equipment include photo-stabilizing the resist prior to implantation or etch, for tiny CDs, and to erase charge accumulated during the manufacture of integrated circuits (ICs). Trymax decided to create this new product in response to market demand.
Finding UV curing/charge erase equipment to increase their manufacturing capacity or even just to maintain their current tooling was proving to be problematic for a number of IC fabs. Customers were forced to rely primarily on infrequently available refurbished components and equipment.
New memory and logic devices are now possible wih the launch of next-generation selective etch tools by a number of etch providers. Next-generation selective etch systems, also known as highly-selective etch systems, were initially shipped by Applied Materials.
In advance of cutting-edge products like 3D DRAM and gate-all-around transistors, companies like Lam Research, TEL, and others are shipping equipment with highly-selective etch capabilities. During the manufacturing of integrated circuits (ICs), a specialized etch tool uses highly-selective etch to remove or etche away materials from small chip architectures.
Additionally, the materials can be removed in any direction (isotropically) with these highly selective etch tools without causing harm to the device’s other components. In rare circumstances, materials can be removed in one direction (anistropically) by extremely selective etch instruments.
There are certain existing etch tools that can do selective etches to varying degrees, but their capabilities are constrained here and they cannot build the new device architectures at advanced nodes.
The Global Wafer Dry Etching System Market accounted for $XX Billion in 2023 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2024 to 2030.
The NA-1500 dry etching equipment from ULVAC is designed for 600mm advanced packaging substrates. ULVAC debuted the NA-1500 dry etching equipment for 600mm advanced packaging substrates, which allows for consistent Descum and Ti etching procedures.
Higher data transfer rates necessitate high-density packaging, whereas modern mobile and wireless devices necessitate thinner and higher-pin-count IC packages. Fan-Out Wafer Level Packaging (FO-WLP) is common, whereas Panel Level Packaging expands substrate size from 300mm to 600mm.
While there are several dry etching systems for 200mm/300mm wafers on the market today, there was no dry etching system for 600mm substrate that provided a uniform Descum process and Ti etching procedure. ULVAC created the technology to meet this need while also supporting mass-produced packaging processes.
Because the plasma source is also suitable for fluorine gases, seed layer Ti etching, which needs a wet procedure, can be carried out without the need for side etching.
The NA-1500 also supports SiO2 and SiN etching. The NA-1500 dry etching system also offers reliable transfer and operations that are free of anomalous discharge, guaranteeing that warpage from the expanded substrate is never a concern.
Phosphorus silicate glass (PSG), which naturally forms during the diffusion process, is removed during this process stage in the production of solar cells.
Amtech will use the license it has been granted for this special PSG technology, which will be produced by PST, to increase its market share in the expanding solar industry. During the dry etching process, PST employs a proprietary technology that enables high productivity and lower total cost of ownership.