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The desire for integrated circuits (IC) with higher performance at cheaper costs than their predecessors is constant in the semiconductor industry. By carefully regulating the film characteristics, linewidths, and potential defect levels, wafer metrology tools are used to develop and build ICs in order to maximise the production process for these devices.
It is possible to make sure that they target the physical and electrical attributes of semiconductor devices in manufacturing by combining metrology tools with wafer inspection capabilities. Wafer metrology is able to precisely pinpoint surface impurities, pattern errors, and other circumstances that might have a negative impact on the functionality of these devices.
The Global Wafer Metrology Tool market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2023 to 2030.
A benchtop or desktop semi-automated Wafer Metrology Tool for semi-insulating and semiconducting materials is called the Proforma 300iSA. The Proform 300iSA provides full wafer surface scanning for thickness, thickness variation, bow, warp, sori, site, and global flatness. It is based on MTII’s proprietary Push-Pull capacitance technology. To create comprehensive three-dimensional (3D) wafer images, user-defined scan patterns that adhere to ASTM/SEMI standards are used.
Tabular data of each wafer measured can be viewed in customised data reports, and data can be quickly and easily exported to your spreadsheet application. Specifications for Wafer Dimensions: 150, 200, and 300 mmAll semiconducting and semi insulating wafers, such as Si, GaAs, Ge, SiC, and InP, are made of this material. Lapped, etched, polished, and patterned as-cut.
All SEMI Standards are either flat or notched. Types of conductivity: P or N.A unique set of MTI capacitance sensors with exceptional repeatability and accuracy. without recalibration, the entire thickness measurement range of 1000 m. Measures Site, Global Flatness, Bow, Warp, TTV, and Thickness.
User interface for Windows. ASTM Recommended values. Design complies with SEMI S2-0200 for health and safety. Design that is ergonomically sound, SEMI S8-0999.all materials, including Si, GaAs, Ge, InP, and SiC, are measured. *** *** as long as the bulk resistivity is below 20 K Ohm/cm
