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For oxidation, diffusion, and CVD purposes, silicon wafers are typically heated in a furnace known as a diffusion or oxidation furnace during the semiconductor manufacturing process.
In a diffusion furnace, silicon wafers are heated by being placed inside an inner tube such as a liner tube or diffusion tube. While the diffusion tube is typically made of silicon carbide or quartz, the liner tube is typically made of silicon carbide, quartz, or mullite.
The heating coils that surround the inner tube of the diffusion furnace deteriorate and sag into touch with the tube over time and repeatedly operate the furnace. The silicon carbide tube tends to crack as a result of arcing when it comes into contact with the heating coils.
The Global Furnace liners market accounted for $XX Billion in 2021 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2022 to 2030.
Isothermal Furnace Liners (IFLs) are liquid metal heat pipes in the form of rings that offer a working environment with a constant temperature. Boyd Corporation’s IFLs achieve isothermal wall temperature to maximise production while saving time and energy. The IFL has no moving parts, is easy to install, offers design flexibility, and is incredibly dependable and economical.
The IFL does not rely on heat transfer channels connecting to adjacent walls or the outside environment, unlike probes. Boyd IFLs use a single heater and controller to create a single, uniform temperature zone in the majority of applications.
Two or more IFLs may be used in sequence for various, individually regulated zones or step changes in temperature profile. Frequent profile readings are not required for temperature adjustment, which is a straightforward one-step procedure.
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