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KrF (Krypton Fluoride) scanners are a particular kind of laser scanner used in the semiconductor industry’s photolithography process to print patterns on a substrate (usually silicon wafers).
KrF (Krypton Fluoride) is the name of the kind of laser that is employed; it produces light with an ultraviolet (UV) wavelength range and has the ability to produce high-resolution patterns on a wafer coated with photoresist.
Because it enables the generation of smaller and more complicated patterns than previous technologies, the KrF laser is widely employed in the manufacturing of modern microchips.
Global KrF scanner market accounted for $XX Billion in 2022 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2023 to 2030.
The FPA-6300ES6a Deep Ultra-Violet (DUV) scanner is a lithography tool using a KrF excimer laser light source for the high-volume manufacture of memory, logic, and image-processing devices, according to a recent announcement by Canon U.S.A., Inc., a leader in digital imaging solutions.
The need for the semiconductors used in the manufacture of computers, smartphones, and other complex electronic devices has expanded along with the demand for these goods, necessitating the need for equipment that can give high productivity, precision, dependability, and capacity utilisation.
Canon introduced the new FPA-6300ES6a, which was created for the mass production of Dynamic Random Access Memory (DRAM), flash, and other memory devices, logic devices, such as microprocessors for personal computers, colour filters, and other imaging sensors, as well as image-processing devices, in response to these market demands.
Canon’s new FPA-6300ES6a DUV scanner, which is based on technology developed via the field-proven FPA-6000 series, delivers high throughput and high-overlay accuracy to successfully address the advanced needs of chip manufacturers seeking lower cost of ownership.
A newly created Reticle Stage and Wafer Stage that achieve quicker exposure processes and greatly shorten required exposure periods are included in the new Canon DUV scanner. The FPA-6300ES6a model achieves a high throughput rate of more than 200 wafers per hour, a 60 percent increase over its predecessor, by streamlining the wafer alignment sequence and speeding up other processes.
