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Last Updated: Apr 25, 2025 | Study Period: 2024-2030
These systems frequently carry out highly repeatable tasks needing high degrees of precision. For oxide and nitride depositions, single-wafer PECVD systems are more frequently used, but batch systems are also available.
Deposition is a fabrication method whereby materials are applied to a wafer in thin sheets. A microsystem is created by depositing many layers of various materials. Every material and layer has a specific purpose.
A wafer, also known as a slice or substrate, is a thin semiconductor slice used in electronics to make solar cells and integrated circuits. It is often made of crystalline silicon (c-Si). Microelectronic devices are constructed in and upon the wafer, which acts as the substrate for those devices.
Deposition is a technique that covers a surface with a layer of materials. Selective deposition, atomic-layer deposition, chemical vapour deposition, and physical vapour deposition are a few methods that can be used to accomplish this.

The global Single Wafer Deposition System market accounted for $XX Billion in 2023 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2024 to 2030.
Tokyo Electron (TEL) announced today that the Triase+EX-II Pro single-wafer metallization system will soon go on sale.
A high-speed single-wafer ASD1 system called the Triase+ EX-II Pro can deposit films made of titanium nitride (TiN) and titanium silicon nitride (TiSiN). The soon-to-be-released Triase+ EX-II Pro has been created to meet the technological requirements of advanced devices that feature increasingly complex structures and multilayered design, building on the existing Triase+ EX-II TiN series that have been used in the interconnect and electrode metallization processes for memory and logic devices.
Numerous benefits come with the Triase+ EX-II Pro, such as outstanding step coverage for high aspect ratio structures, continuity of ultra-thin films, consistency of film thickness, increased productivity over earlier models, and process compliance with different temperature zones.
The Triase+ EX-II Pro has a gas delivery system that allows for high-volume gas flow with high purge efficiency2 as well as a heat controlling system to support these capabilities. Existing customers can upgrade to the most recent hardware at a lower cost by retrofitting earlier models with these new features.
According to, Vice President & General Manager, TFF BU at TEL, "The Triase+ EX-II Pro delivers a technology solution that meets the latest device scaling needs. They will keep responding to even more difficult problems of the future by enhancing technology development and expanding their product line.
| Sl no | Topic |
| 1 | Market Segmentation |
| 2 | Scope of the report |
| 3 | Abbreviations |
| 4 | Research Methodology |
| 5 | Executive Summary |
| 6 | Introduction |
| 7 | Insights from Industry stakeholders |
| 8 | Cost breakdown of Product by sub-components and average profit margin |
| 9 | Disruptive innovation in the Industry |
| 10 | Technology trends in the Industry |
| 11 | Consumer trends in the industry |
| 12 | Recent Production Milestones |
| 13 | Component Manufacturing in US, EU and China |
| 14 | COVID-19 impact on overall market |
| 15 | COVID-19 impact on Production of components |
| 16 | COVID-19 impact on Point of sale |
| 17 | Market Segmentation, Dynamics and Forecast by Geography, 2024-2030 |
| 18 | Market Segmentation, Dynamics and Forecast by Product Type, 2024-2030 |
| 19 | Market Segmentation, Dynamics and Forecast by Application, 2024-2030 |
| 20 | Market Segmentation, Dynamics and Forecast by End use, 2024-2030 |
| 21 | Product installation rate by OEM, 2023 |
| 22 | Incline/Decline in Average B-2-B selling price in past 5 years |
| 23 | Competition from substitute products |
| 24 | Gross margin and average profitability of suppliers |
| 25 | New product development in past 12 months |
| 26 | M&A in past 12 months |
| 27 | Growth strategy of leading players |
| 28 | Market share of vendors, 2023 |
| 29 | Company Profiles |
| 30 | Unmet needs and opportunity for new suppliers |
| 31 | Conclusion |
| 32 | Appendix |