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A robotics system called an automated wafer handler is made to simplify and automate the handling of silicon wafers during the production of semiconductors.
In order to complete various manufacturing activities during the course of the semiconductor production lifecycle, wafer handlers are integrated with semiconductor process tools.
A wafer is a piece of semiconductor material that is shaped like a very thin disc and made of silicon, one of the most prevalent semiconductors in use today.
Silicon-based photovoltaic cells and electronic integrated circuits (ICs) are both made from wafers. The wafer acts as the substrate in these designs.
The Global Wafer Handling Ceramic Vacuum market accounted for $XX Billion in 2023 and is anticipated to reach $XX Billion by 2030, registering a CAGR of XX% from 2024 to 2030.
The ceramic end effector’s high rigidity allows accurate wafer handling despite the robot’s quick motions. The ceramic composition also enables a variety of cleaning techniques that other materials could not endure and allows the hand to withstand high temperatures without altering form.
It is common practice to dissipate static accumulation on the wafer surface using ESD-safe ceramics. A variety of end effectors, often known as wafer handling robot “arms” or “blades,” are made to support various wafer diameters, thicknesses, and material types.
End effectors can be designed to hold wafers with little or no contact, to hold wafers firmly in place mechanically or by vacuum, or to turn wafers over for double-sided processes, depending on the process application.
With almost endless combinations of materials, coatings, styles, forms, weights, finishes, and contact, vacuum, or gripping qualities, Coors Tek can assist the customer in engineering a precision end effector for their application.
Semiconductor wafers are moved between places in wafer processing equipment and carriers by end effectors, which are like the robot’s hands.
To handle wafers safely without breaking equipment or contaminating the air with particulate matter, end effectors must be dimensionally accurate, thermally stable, and have a smooth, abrasion-resistant surface.
